Piezoelectric MEMS for efficient energy harvesting - PiezoMEMS

Project summary

The project proposes to develop a new piezoelectric harvester based on micro-electro-mechanical system (MEMS) devices and piezoelectric materials together with storage module and power circuitry. It focuses on small-scale power energy harvesting techniques (1-100µW) for autonomous operation of portable or embedded micro devices and systems. The harvester will include a MEMS device based on 10÷20 micrometric structures, covered with a piezoelectric thin film (ZnO/doped ZnO or KNN), connected together for increasing the power density. Expected results: New technology and Prototype of a piezoMEMS harvester for powering portable biomedical devices or sensor networks, tested in real environment applications. Potential benefits: Green and cheap energy, reduction of CO2 emissions, improving quality of life. The project will impact the field of MEMS and piezomaterials manufacture, portable medical devices, sensors networks and green energy production.