Graphene Fabrication, Integration and Metrology for Nanoelectromechanical Systems - NanoGraM

Project summary

NanoGraM will explore new Nano-/Microelectromechanical (NEMS/MEMS) devices based on graphene interfaces and surfaces. NanoGraM will focus on three device concepts for potential future products: • Graphene-membrane pressure sensors (industrial, automotive, smart homes, etc.) • Graphene microphones (smart phones, laptops, automotive, industrial, smart homes, etc.) • Graphene-membrane Hall sensors (industrial, automotive, smart phones, etc.) The expected benefits are increased sensor sensitivity (up to factor 100), robustness (up to factor 5), reduction of size, enhanced signal-to-noise ratios and the avoidance of hazardous materials in processing. The integration of graphene NEMS/MEMS sensors with silicon technology will enable smart systems that enhance the well being of people, food quality, traffic safety, pollution monitoring or homeland security. The research activities will provide a decisive technology lead for the industrial NEMS manufacturer and the participating SMEs.